Ugrás a tartalomra Ugrás a navigációs menübe

Precision cross table with cleanroom energy chain

Our LMSSA precision cross table is used for the optical inspection of wafers in the semiconductor industry. A special feature is the cleanroom-compatible energy supply, which ensures low-noise operation with almost no particle contamination.

The LMSSA precision cross table that we supply as a standardised system in our product portfolio is based on our LMSSA precision axes. The most important component and customization requirement was the special requirement for particle-free operation in a cleanroom-compatible application. Therefore, a flat cable routing system made of high-performance plastic is used that shows no visible wear and is abrasion-resistant. The open chamber systems make it easy to replace or add bendable stranding elements – with or without plugs – support chains or hoses.

Our precision systems – standardized systems that can be easily adapted to customer-specific applications.

Requirements:

  • High precisionn
  • Cleanroom-compatible cable carrier
  • Limited installation space
  • Fast response time on the part of the supplier


HIWIN components:

Go directly to the installed HIWIN components and use the CAD configurator or download the corresponding CAD model:


Fields of application:

Lösungen_Inspizieren_Präzisionskreuztisch mit Reinraum-Energiekette_Inhalt_500x300px_rgb.jpg